Shenyang Starlight Advanced Ceramics Achieves Milestone in Semiconductor Manufacturing with Precision 451mm OD Liner Tubes for 12-inch Wafer Processing

Shenyang Starlight Advanced Ceramics Co., Ltd., a pioneer in silicon carbide manufacturing with over three decades of expertise, has recently achieved a significant breakthrough by successfully delivering specialized 451mm outer diameter (OD) liner tubes for 12-inch semiconductor wafer fabrication processes. This accomplishment underscores the company's leadership in advancing critical ceramic components for the global semiconductor industry. The newly developed liner tubes, designed specifically for high-temperature wafer processing applications, feature an optimized flange outer diameter of 451mm, engineered to meet the stringent requirements of advanced semiconductor manufacturing equipment. Utilizing ultra-high-purity silicon carbide (≥99.999%) with exceptional thermal stability (operating range: ambient to 1,450°C), these liner tubes components ensure minimal thermal expansion (coefficient of 4.0×10⁻⁶/K) and superior resistance to corrosive process gases, enabling consistent performance in oxidation, diffusion, and chemical vapor deposition (CVD) processes. The liner tubes' precision engineering guarantees dimensional tolerances within ±0.05mm and surface roughness below Ra 0.1μm, critical for maintaining wafer integrity and reducing particle contamination risks in cleanroom environments.

The liner tubes development process involved 18 months of rigorous R&D collaboration with leading semiconductor manufacturers, incorporating advanced finite element analysis (FEA) to optimize gas flow dynamics and thermal uniformity across the 300mm inner diameter. Over 500 thermal cycling tests validated the liner tubes' durability under rapid temperature fluctuations, while proprietary sintering techniques ensured liner tubes structural integrity at extreme temperatures. Production occurs in ISO Class 5 cleanrooms, with each unit undergoing comprehensive liner tubes quality checks, including helium leak testing, residual gas analysis (RGA), and metrology validation using laser scanners and coordinate measuring machines (CMMs). Early adopters in advanced logic and memory chip production have reported a 35% reduction in furnace downtime and a 20% improvement in wafer yield compared to traditional quartz liners, attributed to the material's inherent chemical inertness and reduced maintenance requirements.

This liner tubes innovation addresses the semiconductor industry's escalating demand for larger wafer sizes and higher process consistency, particularly as manufacturers transition to sub-5nm nodes. The 451mm OD design enables seamless integration with next-generation vertical furnaces, while the material's ultra-low metallic impurity levels (<0.1ppb) prevent dopant contamination in sensitive processes. Beyond current applications, Shenyang Starlight is actively developing smart liner tubes prototypes with embedded sensors for real-time temperature monitoring and adaptive thermal management systems compatible with Industry 4.0 manufacturing ecosystems.

With a legacy spanning 30 years and over 2,000 successful client partnerships, Shenyang Starlight continues to drive innovation in high-performance ceramics, combining material science excellence with precision engineering to solve the semiconductor industry's most complex challenges.